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3-0915 (first published)
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and device structures on glass in flat panel display (FPD) manufacturing
This Guide is intended to promote interoperable application of XML in a variety of semiconductor manufacturing usage contexts
E13300 - SEMI E133 - Specification for Automated Process Control Systems Interface StdTpc-Chemical & Gas Testing 3-0915 (first published)In order to more efficiently facilitate the integration of process control systems (PCS) such as run to run (R2R) control, fault detection (FD), fault classification (FC), fault prediction (FP), statistical process control (SPC), etc. into current and future fabs, there is a need to define interfaces for PCS that enable them to interact effectively and share data (1) among themselves and (2) with the other interdependent factory systems (including
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