F10000 - SEMI F100 - Compliance Test Method for Minimum Flow Coefficient of Diaphragm Valve for Metric PFA Tube StdPbc-0121 本安全ガイドラインは，半導体製造装置で実現すべき，一連の環境，健康，安全（environmental

本安全ガイドラインは，半導体製造装置で実現すべき，一連の環境，健康，安全（environmental

This Guide addresses the process

dry semiconductor wafers

or of an array of TSVs

F10000 - SEMI F100 - Compliance Test Method for Minimum Flow Coefficient of Diaphragm Valve for Metric PFA Tube StdPbc-0121 本安全ガイドラインは，半導体製造装置で実現すべき，一連の環境，健康，安全（environmentalThis test method was technically approved by the Global Liquid Chemicals Committee. This edition was approved for publication by the global Audits and Reviews Subcommittee on March 11, 2005. It was available at www. semi. org in June 2005. NOTICE: This Standard or Safety Guideline has an Inactive Status because the conditions to maintain Current Status have not been met. Inactive Standards or Safety Guidelines are available from SEMI and continue to