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Boron and phosphorus are common dopants in solar Si wafers
it may be necessary to use test positions other than those specified in order to adequately describe the distribution pattern
SEMI E30-0703 (technical revision)
and evaluation of lines
F00500 - SEMI F5 - ガス状廃棄物処理のガイドライン Revision:SEMI F5-1101 - Inactive Boron and phosphorus are commonNOTICE: This translation is a REFERENCE COPY ONLY. If differences should exist between the English version and a translation in any other language, the English version is the official and authoritative version. SEMI SEMI Global Environmental Health and Safety CommitteeNorth American Environmental Health & Safety Committee2001827North American Regional Standards Committee20019www. semi. org2001111990 NOTICE: This Standard or Safety Guideline has an