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originally published in 1990
This specification was technically approved by the Global Flat Panel Display – Equipment Committee and is the direct responsibility of the North American Flat Panel Display Committee
To comply with this Specification
SEMI E63-0600 (technical revision)
E10900 - SEMI E109 - Specification for Reticle and Pod Management (RPMS) Revision:SEMI E109-1017 - Superseded originally published in 1990This Specification provides standardized behavior for lithography, reticle inspection, and bare reticle stocker equipment. It also provides for standardized communication with lithography, reticle inspection, and bare reticle stocker equipment. This includes the coordination, execution, and completion of automated and manual reticle pod transfers to and from the equipment, transfer of reticles to and from the reticle pods, movement of the reticles
US$ 316.00
US$ 35.99