D01600 - SEMI D16 - FPDマテリアルハンドリングシステムとツールポート間の機械的インタフェース仕様 StdTpc-Gases - Noble Specification for 150 mm (6

Specification for 150 mm (6 inch) Port

SEMI E112-1101 (first published)

1-0709 (technical revision)

Many requirements given in this Specification are in the form of maximum or minimum dimensions with very few required surfaces

D01600 - SEMI D16 - FPDマテリアルハンドリングシステムとツールポート間の機械的インタフェース仕様 StdTpc-Gases - Noble Specification for 150 mm (6Flat Panel Display Equipment CommitteeNorth American Flat Panel Display Committee19987North American Regional Standards Committee19987SEMI On Line19989 FPD WIPAGV Referenced SEMI Standards SEMI D5 Standard Size for Flat Panel Display Substrates SEMI D11 Specification for Flat Panel Display Glass Substrate Cassettes